YSZ layers by pulsed-MOCVD on solid oxide fuel cell electrodes

Susan P. Krumdieck*, Orfeo Sbaizero, Angela Bullert, Rishi Raj

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


An experimental pulsed-MOCVD system was used to produce solid zirconia, and yttria-stabilized-zirconia (YSZ) films on porous nickel-cermet samples. A total of six candidate metal-organic precursors for zirconia and three for yttria were investigated. Three precursor solutions for YSZ were identified as desirable for pulsed-MOCVD processing. Under optimal deposition conditions, precursor conversion efficiency of 90% was achieved at film growth rates of 6-7.5 μm h-1 at deposition temperature of 525 °C. Film growth rates were determined from in situ color shift method, and by scanning electron microscope examination of the deposited layer. Powder X-ray diffraction of the film surface identified the layer as YSZ. Layers deposited on Ni-cermet samples remained intact on cooling. Results for thicker (10 μm or greater) YSZ layers indicate the process could be developed for low-cost solid oxide fuel cell electrodes, but co-development of electrode processing and YSZ electrolyte deposition will be crucial.

Original languageEnglish
Pages (from-to)226-233
Number of pages8
JournalSurface and Coatings Technology
Issue number2-3
Publication statusPublished - 22 Apr 2003


  • Pulsed-MOCVD
  • Solid oxide fuel cell
  • YSZ
  • Zirconium alkoxide precursors

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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