Abstract
An experimental pulsed-MOCVD system was used to produce solid zirconia, and yttria-stabilized-zirconia (YSZ) films on porous nickel-cermet samples. A total of six candidate metal-organic precursors for zirconia and three for yttria were investigated. Three precursor solutions for YSZ were identified as desirable for pulsed-MOCVD processing. Under optimal deposition conditions, precursor conversion efficiency of 90% was achieved at film growth rates of 6-7.5 μm h-1 at deposition temperature of 525 °C. Film growth rates were determined from in situ color shift method, and by scanning electron microscope examination of the deposited layer. Powder X-ray diffraction of the film surface identified the layer as YSZ. Layers deposited on Ni-cermet samples remained intact on cooling. Results for thicker (10 μm or greater) YSZ layers indicate the process could be developed for low-cost solid oxide fuel cell electrodes, but co-development of electrode processing and YSZ electrolyte deposition will be crucial.
Original language | English |
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Pages (from-to) | 226-233 |
Number of pages | 8 |
Journal | Surface and Coatings Technology |
Volume | 167 |
Issue number | 2-3 |
DOIs | |
Publication status | Published - 22 Apr 2003 |
Keywords
- Pulsed-MOCVD
- Solid oxide fuel cell
- YSZ
- Zirconium alkoxide precursors
ASJC Scopus subject areas
- General Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry