@inproceedings{a5e636bad5224e71849f255ac87cdb07,
title = "Verification and Induction Method for Low Frequency Response Failure Modes in Acoustic MEMS",
abstract = "In this paper we present a novel verification and induction method for low frequency response failure modes in MEMS microphones. Response from the device is captured before and after the occurrence of a defect present on the diaphragm of the microphone and induced by focus ion beam machining. The deviation in the frequency response of the microphone shows a good agreement with analytical results.",
author = "Gergely Hantos and Desmulliez, {Marc P. Y.}",
year = "2020",
month = jun,
day = "4",
doi = "10.1109/ICMTS48187.2020.9107925",
language = "English",
series = "IEEE International Conference on Microelectronic Test Structures",
publisher = "IEEE",
booktitle = "2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)",
address = "United States",
note = "33rd IEEE International Conference on Microelectronic Test Structures 2020, ICMTS 2020 ; Conference date: 04-05-2020 Through 18-05-2020",
}