Verification and Induction Method for Low Frequency Response Failure Modes in Acoustic MEMS

Gergely Hantos, Marc P. Y. Desmulliez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we present a novel verification and induction method for low frequency response failure modes in MEMS microphones. Response from the device is captured before and after the occurrence of a defect present on the diaphragm of the microphone and induced by focus ion beam machining. The deviation in the frequency response of the microphone shows a good agreement with analytical results.

Original languageEnglish
Title of host publication2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)
PublisherIEEE
ISBN (Electronic)9781728140087
DOIs
Publication statusPublished - 4 Jun 2020
Event33rd IEEE International Conference on Microelectronic Test Structures 2020 - Edinburgh, United Kingdom
Duration: 4 May 202018 May 2020

Publication series

NameIEEE International Conference on Microelectronic Test Structures
ISSN (Electronic)2158-1029

Conference

Conference33rd IEEE International Conference on Microelectronic Test Structures 2020
Abbreviated titleICMTS 2020
CountryUnited Kingdom
CityEdinburgh
Period4/05/2018/05/20

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Hantos, G., & Desmulliez, M. P. Y. (2020). Verification and Induction Method for Low Frequency Response Failure Modes in Acoustic MEMS. In 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) [9107925] (IEEE International Conference on Microelectronic Test Structures). IEEE. https://doi.org/10.1109/ICMTS48187.2020.9107925