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Vacancy engineering for highly activated 'diffusionless' boron doping in bulk silicon
Nick S Bennett, Nick E. B. Cowern, S. Paul, Wilfried Lerch, Hamid Kheyrandish, A. J. Smith, R. M. Gwilliam, B. J. Seal
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)