V-shaped and Z-shaped SU-8 micro-tweezers with in-plane displacement for micromanipulation

R. C. Voicu, C. Tibeica, M. Al Zandi, A. Potekhina, C. H. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the design, simulation, measurements, and experimental testing results of two micro-tweezers fabricated using SU-8 polymer as structural material. The micro-tweezers are electro-thermally actuated with a V-shaped and Z-shaped actuator, respectively. The micro-tweezers are in the normally closed mode operation. The structures were simulated using the finite element method within Coventorware software in order to determine their electro-thermo-mechanical behaviors. Electro-thermo-mechanical measurements and characterizations have been performed to determine the openings and the temperature distribution in the micro-tweezers as a function of electrical current. The measurements show a maximum in-plane opening of 61 μm between the tips of the V-shaped micro-tweezer at an electrical current of 53.7 mA while for the Z-shaped micro-tweezer an opening of 80 μm was obtained for at 54 mA. In both cases the out-of-plane deflection remains below 0.1 μm during actuation. A comparison between the simulations results and the measurements has been made. Functional tests were performed in order to prove the capability of the micro-tweezers by performing pick-and-placement operations to manipulate glass beads as the micro-objects.

Original languageEnglish
Title of host publication2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
PublisherIEEE
ISBN (Electronic)9781728109480
DOIs
Publication statusPublished - 7 Oct 2019
Event4th International Conference on Manipulation, Automation, and Robotics at Small Scales 2019 - Helsinki, Finland
Duration: 1 Jul 20195 Jul 2019

Conference

Conference4th International Conference on Manipulation, Automation, and Robotics at Small Scales 2019
Abbreviated titleMARSS 2019
CountryFinland
CityHelsinki
Period1/07/195/07/19

ASJC Scopus subject areas

  • Artificial Intelligence
  • Industrial and Manufacturing Engineering
  • Materials Science (miscellaneous)
  • Control and Optimization
  • Instrumentation

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    Voicu, R. C., Tibeica, C., Al Zandi, M., Potekhina, A., & Wang, C. H. (2019). V-shaped and Z-shaped SU-8 micro-tweezers with in-plane displacement for micromanipulation. In 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) [8860941] IEEE. https://doi.org/10.1109/MARSS.2019.8860941