Abstract
Copper micro-patterns have been fabricated on polyimide substrates without the use of evaporation techniques or photoresist materials. A novel easy light-directed metal patterning method has been achieved by using a photoreactive polymer reducing agent, methoxy poly(ethylene glycol) (MPEG) as a thin film coating,. The interaction of UV light and MPEG in ethanol film enables the photoreduction of mobile silver ions previously incorporated within the surface-modified polyimide substrates. The silver nanoparticle patterns thus formed serve as a active catalytic seed layer for subsequent electroless copper plating. Narrow copper tracks with low resistivity close to that of bulk copper have been achieved. ©2008 IEEE.
Original language | English |
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Title of host publication | Proceedings - 2008 2nd Electronics Systemintegration Technology Conference, ESTC |
Pages | 691-694 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2008 |
Event | 2008 2nd Electronics Systemintegration Technology Conference - Greenwich, United Kingdom Duration: 1 Sept 2008 → 4 Sept 2008 |
Conference
Conference | 2008 2nd Electronics Systemintegration Technology Conference |
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Abbreviated title | ESTC |
Country/Territory | United Kingdom |
City | Greenwich |
Period | 1/09/08 → 4/09/08 |