Unusual morphology of CVD diamond surfaces after RIE

Maria D Stoiku; Phillip John; J. I B Wilson

doi:10.1016/j.diamond.2008.03.018

Unusual morphology of CVD diamond surfaces after RIE

Maria D Stoiku
, Phillip John
, J. I B Wilson

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

Reactive ion etching of (100) CVD diamond films in O₂ has been performed using a 13.56 MHz capacitively coupled reactor at pressures of 20 mTorr-100 mTorr and r.f. powers of 100 W-300 W. The formation of columnar structures was observed at the grain boundaries whereas the (100) facets were etched to yield a smooth surface under optimum conditions. For comparison, the RIE of single, isolated cubo-octahedral crystallites produced smooth (100) facets and roughened (111) surfaces reminiscent of the micro-columnar structures evident in the films. © 2008 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	1164-1168
Number of pages	5
Journal	Diamond and Related Materials
Volume	17
Issue number	7-10
DOIs	https://doi.org/10.1016/j.diamond.2008.03.018
Publication status	Published - Jul 2008

Keywords

Chemical vapor deposition
Diamond film
Microstructure
Plasma CVD
Reactive ion etching (RIE)

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10.1016/j.diamond.2008.03.018

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@article{9b09e3a79a394b639850543d9d65e127,

title = "Unusual morphology of CVD diamond surfaces after RIE",

abstract = "Reactive ion etching of (100) CVD diamond films in O2 has been performed using a 13.56 MHz capacitively coupled reactor at pressures of 20 mTorr-100 mTorr and r.f. powers of 100 W-300 W. The formation of columnar structures was observed at the grain boundaries whereas the (100) facets were etched to yield a smooth surface under optimum conditions. For comparison, the RIE of single, isolated cubo-octahedral crystallites produced smooth (100) facets and roughened (111) surfaces reminiscent of the micro-columnar structures evident in the films. {\textcopyright} 2008 Elsevier B.V. All rights reserved.",

keywords = "Chemical vapor deposition, Diamond film, Microstructure, Plasma CVD, Reactive ion etching (RIE)",

author = "Stoiku, \{Maria D\} and Phillip John and Wilson, \{J. I B\}",

year = "2008",

month = jul,

doi = "10.1016/j.diamond.2008.03.018",

language = "English",

volume = "17",

pages = "1164--1168",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

number = "7-10",

}

TY - JOUR

T1 - Unusual morphology of CVD diamond surfaces after RIE

AU - Stoiku, Maria D

AU - John, Phillip

AU - Wilson, J. I B

PY - 2008/7

Y1 - 2008/7

N2 - Reactive ion etching of (100) CVD diamond films in O2 has been performed using a 13.56 MHz capacitively coupled reactor at pressures of 20 mTorr-100 mTorr and r.f. powers of 100 W-300 W. The formation of columnar structures was observed at the grain boundaries whereas the (100) facets were etched to yield a smooth surface under optimum conditions. For comparison, the RIE of single, isolated cubo-octahedral crystallites produced smooth (100) facets and roughened (111) surfaces reminiscent of the micro-columnar structures evident in the films. © 2008 Elsevier B.V. All rights reserved.

AB - Reactive ion etching of (100) CVD diamond films in O2 has been performed using a 13.56 MHz capacitively coupled reactor at pressures of 20 mTorr-100 mTorr and r.f. powers of 100 W-300 W. The formation of columnar structures was observed at the grain boundaries whereas the (100) facets were etched to yield a smooth surface under optimum conditions. For comparison, the RIE of single, isolated cubo-octahedral crystallites produced smooth (100) facets and roughened (111) surfaces reminiscent of the micro-columnar structures evident in the films. © 2008 Elsevier B.V. All rights reserved.

KW - Chemical vapor deposition

KW - Diamond film

KW - Microstructure

KW - Plasma CVD

KW - Reactive ion etching (RIE)

UR - https://www.scopus.com/pages/publications/48849108539

U2 - 10.1016/j.diamond.2008.03.018

DO - 10.1016/j.diamond.2008.03.018

M3 - Article

SN - 0925-9635

VL - 17

SP - 1164

EP - 1168

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 7-10

ER -

Unusual morphology of CVD diamond surfaces after RIE

Abstract

Keywords

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