Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization

S. Krumdieck, O. Sbaizero, R. Raj

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization'. Together they form a unique fingerprint.

Physics & Astronomy