Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization

S. Krumdieck*, O. Sbaizero, R. Raj

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization'. Together they form a unique fingerprint.

INIS

Engineering

Material Science

Chemical Engineering