Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.