Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

E. Ramsay; N. Pleynet; D. Xiao; R. J. Warburton; D. T. Reid

doi:10.1364/OL.30.000026

Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.

Original language	English
Pages (from-to)	26-28
Number of pages	3
Journal	Optics Letters
Volume	30
Issue number	1
DOIs	https://doi.org/10.1364/OL.30.000026
Publication status	Published - 1 Jan 2005

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abstract = "We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. {\textcopyright} 2005 Optical Society of America.",

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AU - Warburton, R. J.

AU - Reid, D. T.

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AB - We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.

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Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

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