Abstract
We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.
Original language | English |
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Pages (from-to) | 26-28 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 30 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Jan 2005 |