Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

E. Ramsay; N. Pleynet; D. Xiao; R. J. Warburton; D. T. Reid

doi:10.1364/OL.30.000026

Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.

Original language	English
Pages (from-to)	26-28
Number of pages	3
Journal	Optics Letters
Volume	30
Issue number	1
DOIs	https://doi.org/10.1364/OL.30.000026
Publication status	Published - 1 Jan 2005

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@article{663c3f1d863b4402ae5957f18a5e0f8e,

title = "Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm",

abstract = "We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. {\textcopyright} 2005 Optical Society of America.",

author = "E. Ramsay and N. Pleynet and D. Xiao and Warburton, {R. J.} and Reid, {D. T.}",

note = "EP/C509765/1",

year = "2005",

month = jan,

day = "1",

doi = "10.1364/OL.30.000026",

language = "English",

volume = "30",

pages = "26--28",

journal = "Optics Letters",

issn = "0146-9592",

publisher = "Optica Publishing Group",

number = "1",

}

TY - JOUR

T1 - Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

AU - Ramsay, E.

AU - Pleynet, N.

AU - Xiao, D.

AU - Warburton, R. J.

AU - Reid, D. T.

N1 - EP/C509765/1

PY - 2005/1/1

Y1 - 2005/1/1

N2 - We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.

AB - We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-µm scale are clearly resolvable with high contrast, showing a resolution of 325 nm. © 2005 Optical Society of America.

UR - http://www.scopus.com/inward/record.url?scp=12344325666&partnerID=8YFLogxK

U2 - 10.1364/OL.30.000026

DO - 10.1364/OL.30.000026

M3 - Article

SN - 0146-9592

VL - 30

SP - 26

EP - 28

JO - Optics Letters

JF - Optics Letters

IS - 1

ER -

Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm

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