Two-dimensional monomode optical fibre array manufacture using microengineering techniques

D. Weiland, M. Luetzelschwab, M. P Y Desmulliez

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A method to manufacture two-dimensional bundles of optical single mode fibres is described in this article. Submicron translational alignment accuracy is being implemented by this method. An array of micro holes, each surrounded by four electrodes was produced using the Lithographie Galvanoformung Abformung process. Electrostatic fields between the electrodes and a metal coated optical single mode fibre inserted into such a hole were used to position the fibre inside the hole. By combining electrostatic movement and optical monitoring of the actual fibre position in a closed loop feedback alignment system high positioning accuracy can be realised.

Original languageEnglish
Pages (from-to)965-972
Number of pages8
JournalMicrosystem Technologies
Issue number10-11
Publication statusPublished - Sept 2006


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