Torque evaluation of an electrostatic micromotor

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe, J K Grund

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)115-123
JournalJournal of Microelectromechanical Systems
Volume8
Issue number1
Publication statusPublished - 1999

Cite this

Samper, V. D., Sangster, A. J., Reuben, R. L., Wallrabe, U., & Grund, J. K. (1999). Torque evaluation of an electrostatic micromotor. Journal of Microelectromechanical Systems, 8(1), 115-123.
Samper, V D ; Sangster, A J ; Reuben, Robert Lewis ; Wallrabe, U ; Grund, J K. / Torque evaluation of an electrostatic micromotor. In: Journal of Microelectromechanical Systems. 1999 ; Vol. 8, No. 1. pp. 115-123.
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journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "IEEE",
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Samper, VD, Sangster, AJ, Reuben, RL, Wallrabe, U & Grund, JK 1999, 'Torque evaluation of an electrostatic micromotor', Journal of Microelectromechanical Systems, vol. 8, no. 1, pp. 115-123.

Torque evaluation of an electrostatic micromotor. / Samper, V D; Sangster, A J; Reuben, Robert Lewis; Wallrabe, U; Grund, J K.

In: Journal of Microelectromechanical Systems, Vol. 8, No. 1, 1999, p. 115-123.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Torque evaluation of an electrostatic micromotor

AU - Samper, V D

AU - Sangster, A J

AU - Reuben, Robert Lewis

AU - Wallrabe, U

AU - Grund, J K

PY - 1999

Y1 - 1999

M3 - Article

VL - 8

SP - 115

EP - 123

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 1

ER -

Samper VD, Sangster AJ, Reuben RL, Wallrabe U, Grund JK. Torque evaluation of an electrostatic micromotor. Journal of Microelectromechanical Systems. 1999;8(1):115-123.