Torque evaluation of an electrostatic micromotor

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe, J K Grund

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)115-123
JournalJournal of Microelectromechanical Systems
Volume8
Issue number1
Publication statusPublished - 1999

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