Torque evaluation of an electrostatic micromotor

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe, J K Grund

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	115-123
Journal	Journal of Microelectromechanical Systems
Volume	8
Issue number	1
Publication status	Published - 1999

Cite this

@article{7b6ccfd5994343dc8f1a9858a816ffe3,

title = "Torque evaluation of an electrostatic micromotor",

author = "Samper, {V D} and Sangster, {A J} and Reuben, {Robert Lewis} and U Wallrabe and Grund, {J K}",

year = "1999",

language = "English",

volume = "8",

pages = "115--123",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "1",

}