Original language | English |
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Pages (from-to) | 115-123 |
Journal | Journal of Microelectromechanical Systems |
Volume | 8 |
Issue number | 1 |
Publication status | Published - 1999 |
Torque evaluation of an electrostatic micromotor
V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe, J K Grund
Research output: Contribution to journal › Article