Torque evaluation of an electrostatic micromotor

V D Samper, A J Sangster, Robert Lewis Reuben, U Wallrabe, J K Grund

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)115-123
JournalJournal of Microelectromechanical Systems
Volume8
Issue number1
Publication statusPublished - 1999

Cite this

Samper, V. D., Sangster, A. J., Reuben, R. L., Wallrabe, U., & Grund, J. K. (1999). Torque evaluation of an electrostatic micromotor. Journal of Microelectromechanical Systems, 8(1), 115-123.