Torque evaluation of a LIGA fabricated electrostatic micromotor

V. D. Samper; A. J. Sangster; R. L. Reuben; U. Wallrabe

Torque evaluation of a LIGA fabricated electrostatic micromotor

V. D. Samper, A. J. Sangster, R. L. Reuben, U. Wallrabe

School of Engineering & Physical Sciences

Research output: Contribution to journal › Literature review › peer-review

40 Citations (Scopus)

Abstract

The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10^-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. © 1999 IEEE.

Original language	English
Pages (from-to)	115-123
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	8
Issue number	1
Publication status	Published - Mar 1999

Keywords

Electrostatic
LIGA
Micromotor
Torque
Wobble

Cite this

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title = "Torque evaluation of a LIGA fabricated electrostatic micromotor",

abstract = "The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. {\textcopyright} 1999 IEEE.",

keywords = "Electrostatic, LIGA, Micromotor, Torque, Wobble",

author = "Samper, {V. D.} and Sangster, {A. J.} and Reuben, {R. L.} and U. Wallrabe",

year = "1999",

month = mar,

language = "English",

volume = "8",

pages = "115--123",

journal = "Journal of Microelectromechanical Systems",

publisher = "IEEE",

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TY - JOUR

T1 - Torque evaluation of a LIGA fabricated electrostatic micromotor

AU - Samper, V. D.

AU - Sangster, A. J.

AU - Reuben, R. L.

AU - Wallrabe, U.

PY - 1999/3

Y1 - 1999/3

N2 - The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. © 1999 IEEE.

AB - The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. © 1999 IEEE.

KW - Electrostatic

KW - LIGA

KW - Micromotor

KW - Torque

KW - Wobble

M3 - Literature review

VL - 8

SP - 115

EP - 123

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 1

ER -

Torque evaluation of a LIGA fabricated electrostatic micromotor

Abstract

Keywords

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