Torque evaluation of a LIGA fabricated electrostatic micromotor

V. D. Samper, A. J. Sangster, R. L. Reuben, U. Wallrabe

Research output: Contribution to journalLiterature review

21 Citations (Scopus)

Abstract

The dynamic analysis of a twin stator electrostatic wobble motor is presented incorporating finite element electric field predictions and rolling and sliding friction models. The problem of torque measurement in actual devices is then examined and a solution is described which allows the evaluation of torques smaller than 10-7 Nm without affecting the wobble motion of the device. Theoretical and practical results for actual devices are compared. © 1999 IEEE.

Original languageEnglish
Pages (from-to)115-123
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume8
Issue number1
Publication statusPublished - Mar 1999

Keywords

  • Electrostatic
  • LIGA
  • Micromotor
  • Torque
  • Wobble

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