Three-dimensional particle imaging by wavefront sensing

We present two methods for three-dimensional particle metrology from a single two-dimensional view. The techniques are based on wavefront sensing where the three-dimensional location of a particle is encoded into a single image plane. The first technique is based on multiplanar imaging, and the second produces threedimensional location information via anamorphic distortion of the recorded images. Preliminary results show that an uncertainty of 8 µm in depth can be obtained for low-particle density over a thin plane, and an uncertainty of 30 µm for higher particle density over a 10 mm deep volume. © 2006 Optical Society of Amorica.