Three-dimensional imaging of diffusion volumes in silicon circuits by use of the two-photon optical-beam-induced current effect

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@article{09a71f517eb84ffa962a379d344d5967,

title = "Three-dimensional imaging of diffusion volumes in silicon circuits by use of the two-photon optical-beam-induced current effect",

author = "Reid, \{D. T.\} and E. Ramsay and K. Wilsher",

year = "2002",

month = dec,

language = "English",

volume = "13",

pages = "17--",

journal = "Optics and Photonics News",

publisher = "Optica Publishing Group (formerly OSA)",

number = "12",

}

TY - JOUR

T1 - Three-dimensional imaging of diffusion volumes in silicon circuits by use of the two-photon optical-beam-induced current effect

AU - Reid, D. T.

AU - Ramsay, E.

AU - Wilsher, K.

PY - 2002/12

Y1 - 2002/12

UR - https://www.scopus.com/pages/publications/0036964147

M3 - Article

VL - 13

SP - 17-

JO - Optics and Photonics News

JF - Optics and Photonics News

IS - 12

ER -