Three-dimensional imaging of diffusion volumes in silicon circuits by use of the two-photon optical-beam-induced current effect

D. T. Reid, E. Ramsay, K. Wilsher

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)17-
JournalOptics and Photonics News
Volume13
Issue number12
Publication statusPublished - Dec 2002

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