Thin film shape memory alloys and microactuators

Y. Q. Fu; J. K. Luo; A. J. Flewitt; W. M. Huang; S. Zhang; H. J. Du; W. I. Milne

doi:10.1504/IJCMSSE.2009.027483

Thin film shape memory alloys and microactuators

Y. Q. Fu, J. K. Luo, A. J. Flewitt, W. M. Huang, S. Zhang, H. J. Du, W. I. Milne

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

36 Citations (Scopus)

Abstract

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright © 2009, Inderscience Publishers.

Original language	English
Pages (from-to)	208-226
Number of pages	19
Journal	International Journal of Computational Materials Science and Surface Engineering
Volume	2
Issue number	3-4
DOIs	https://doi.org/10.1504/IJCMSSE.2009.027483
Publication status	Published - 2009

Keywords

MEMS
Micro-electro-mechanical system
Shape memory
Thin films
TiNi

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10.1504/IJCMSSE.2009.027483

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title = "Thin film shape memory alloys and microactuators",

abstract = "For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright {\textcopyright} 2009, Inderscience Publishers.",

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author = "Fu, {Y. Q.} and Luo, {J. K.} and Flewitt, {A. J.} and Huang, {W. M.} and S. Zhang and Du, {H. J.} and Milne, {W. I.}",

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AU - Luo, J. K.

AU - Flewitt, A. J.

AU - Huang, W. M.

AU - Zhang, S.

AU - Du, H. J.

AU - Milne, W. I.

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AB - For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright © 2009, Inderscience Publishers.

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KW - Micro-electro-mechanical system

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KW - Thin films

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Thin film shape memory alloys and microactuators

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Keywords

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