Thin film shape memory alloys and microactuators

Y. Q. Fu, J. K. Luo, A. J. Flewitt, W. M. Huang, S. Zhang, H. J. Du, W. I. Milne

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator applications is discussed. The topics related to film deposition and characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface relief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method. Copyright © 2009, Inderscience Publishers.

Original languageEnglish
Pages (from-to)208-226
Number of pages19
JournalInternational Journal of Computational Materials Science and Surface Engineering
Volume2
Issue number3-4
DOIs
Publication statusPublished - 2009

Keywords

  • MEMS
  • Micro-electro-mechanical system
  • Shape memory
  • Thin films
  • TiNi

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    Fu, Y. Q., Luo, J. K., Flewitt, A. J., Huang, W. M., Zhang, S., Du, H. J., & Milne, W. I. (2009). Thin film shape memory alloys and microactuators. International Journal of Computational Materials Science and Surface Engineering, 2(3-4), 208-226. https://doi.org/10.1504/IJCMSSE.2009.027483