Abstract
This article details the analysis of the thermo-hydraulic performance of a single-phase MEMS Heat sink with pin fins integrated in micro channels. Circular pin-fins with in-line arrangement are considered in this study. The influence of operating and geometric parameters on the performance, (thermal resistance and pressure drop) are studied; the parameters considered include microchannel hydraulic diameter, microchannel spacing, substrate material, pin-fin pitch, and Reynolds number. Additionally, the performance is quantified in terms of a Figure of Merit (FOM) which is the product of normalized thermal resistance and normalized pressure drop. The thermal resistance of heat sink with pin-fin integrated in micro channels is lower than that in heat sinks without pin-fins irrespective of the Reynolds number. On the other hand, the pressure drop associated with heat sink with pin-fins integrated in microchannel is higher than that in heat sinks without pin-fins for all Reynolds number. Also, increase in hydraulic diameter leads to reduction in thermal resistance and increase in pressure drop for a specific Reynolds number. On the other hand, reduction in microchannel spacing leads to reduction in thermal resistance for a specific Reynolds number; the pressure drop is independent of the microchannel spacing. With regards to the influence of substrate material, the thermal resistance decreased with increase in thermal conductivity; the pressure drop is not influenced by changes in substrate material.
| Original language | English |
|---|---|
| Pages (from-to) | 145–157 |
| Number of pages | 13 |
| Journal | Microsystem Technologies |
| Volume | 27 |
| Early online date | 4 Jul 2020 |
| DOIs | |
| Publication status | Published - Jan 2021 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering