Thermal dehydrogenation of glow discharge a-Si

  • P. John
  • , Ibrahim M Odeh
  • , M. J K Thomas
  • , Michael J Tricker
  • , J McGill
  • , A Wallace
  • , J. I B Wilson

Research output: Contribution to journalArticlepeer-review

Abstract

Infra-red spectroscopic studies have been made of glow-discharge hydrogenated amorphous silicon films prepared under a variety of experimental conditions. Other studies have been made of the thermally induced dehydrogenation of these films and a model is suggested to account for their mode of decomposition. © 1980.

Original languageEnglish
Pages (from-to)237-241
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume35-36
Issue numberPART 1
DOIs
Publication statusPublished - Jan 1980

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