Thermal dehydrogenation of glow discharge a-Si

P. John, Ibrahim M Odeh, M. J K Thomas, Michael J Tricker, J McGill, A Wallace, J. I B Wilson

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


Infra-red spectroscopic studies have been made of glow-discharge hydrogenated amorphous silicon films prepared under a variety of experimental conditions. Other studies have been made of the thermally induced dehydrogenation of these films and a model is suggested to account for their mode of decomposition. © 1980.

Original languageEnglish
Pages (from-to)237-241
Number of pages5
JournalJournal of Non-Crystalline Solids
Issue numberPART 1
Publication statusPublished - Jan 1980


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