Thermal dehydrogenation of glow discharge a-Si

P. John; Ibrahim M Odeh; M. J K Thomas; Michael J Tricker; J McGill; A Wallace; J. I B Wilson

doi:10.1016/0022-3093(80)90600-6

Thermal dehydrogenation of glow discharge a-Si

P. John, Ibrahim M Odeh, M. J K Thomas, Michael J Tricker, J McGill, A Wallace, J. I B Wilson

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

Infra-red spectroscopic studies have been made of glow-discharge hydrogenated amorphous silicon films prepared under a variety of experimental conditions. Other studies have been made of the thermally induced dehydrogenation of these films and a model is suggested to account for their mode of decomposition. © 1980.

Original language	English
Pages (from-to)	237-241
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	35-36
Issue number	PART 1
DOIs	https://doi.org/10.1016/0022-3093(80)90600-6
Publication status	Published - Jan 1980

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title = "Thermal dehydrogenation of glow discharge a-Si",

abstract = "Infra-red spectroscopic studies have been made of glow-discharge hydrogenated amorphous silicon films prepared under a variety of experimental conditions. Other studies have been made of the thermally induced dehydrogenation of these films and a model is suggested to account for their mode of decomposition. {\textcopyright} 1980.",

author = "P. John and Odeh, {Ibrahim M} and Thomas, {M. J K} and Tricker, {Michael J} and J McGill and A Wallace and Wilson, {J. I B}",

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AU - Odeh, Ibrahim M

AU - Thomas, M. J K

AU - Tricker, Michael J

AU - McGill, J

AU - Wallace, A

AU - Wilson, J. I B

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AB - Infra-red spectroscopic studies have been made of glow-discharge hydrogenated amorphous silicon films prepared under a variety of experimental conditions. Other studies have been made of the thermally induced dehydrogenation of these films and a model is suggested to account for their mode of decomposition. © 1980.

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DO - 10.1016/0022-3093(80)90600-6

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EP - 241

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

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ER -

Thermal dehydrogenation of glow discharge a-Si

Abstract

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