Microwave plasma deposited (100) diamond films have been thermally oxidized in dry O2 between 500 and 723 °C. The roughness of a single crystalline grain following oxidation is consistent with a layer-by-layer mechanism for the removal of carbon monoxide. The resulting surface exhibits infrared absorption bands at 1731 and 905 cm-1, attributed to the stretching and bending modes of a surface bonded carbonyl group. The former is within 1 cm-1 of the structurally analogous molecule 2-adamantanone. These data are consistent with the carbonyl groups being present on diamond (100) terraces. Copyright © 2003 American Chemical Society.