The oxidation of (100) textured diamond

P. John; N. Polwart; C. E. Troupe; J. I B Wilson

doi:10.1016/S0925-9635(01)00673-2

The oxidation of (100) textured diamond

P. John, N. Polwart, C. E. Troupe, J. I B Wilson

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

85 Citations (Scopus)

Abstract

The thermal oxidation of highly textured (100) chemical vapour deposited (CVD) diamond has been investigated using a combination of high resolution X-ray photoelectron spectroscopy. The diamond samples were oxidised in dry O₂ in a vacuum furnace at temperatures up to 800 °C. The kinetics of oxidation of well-defined crystal facets of (100) diamond have been studied using in-situ laser interferometry and thermogravimetric analysis. Concomitant scanning probe microscopic examination of individual facets after oxidation revealed negligible changes to the surface roughness. Oxygen containing functional groups such as ether (COC) and carbonyl (>C=O) have been observed using X-ray photoelectron spectroscopy at all the surface coverages investigated. Even at higher coverages the formation of higher oxidation states such as carboxylic acid groupings was negligible (<2.5%). Angle resolved X-ray photoelectron spectroscopy measurements have been used to discriminate between surface and sub-surface oxygen. © 2002 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	861-866
Number of pages	6
Journal	Diamond and Related Materials
Volume	11
Issue number	3-6
DOIs	https://doi.org/10.1016/S0925-9635(01)00673-2
Publication status	Published - Mar 2002

Keywords

Etching
Photoelectron spectroscopy
Surface
Thermal-oxidation

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10.1016/S0925-9635(01)00673-2

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title = "The oxidation of (100) textured diamond",

abstract = "The thermal oxidation of highly textured (100) chemical vapour deposited (CVD) diamond has been investigated using a combination of high resolution X-ray photoelectron spectroscopy. The diamond samples were oxidised in dry O2 in a vacuum furnace at temperatures up to 800 °C. The kinetics of oxidation of well-defined crystal facets of (100) diamond have been studied using in-situ laser interferometry and thermogravimetric analysis. Concomitant scanning probe microscopic examination of individual facets after oxidation revealed negligible changes to the surface roughness. Oxygen containing functional groups such as ether (COC) and carbonyl (>C=O) have been observed using X-ray photoelectron spectroscopy at all the surface coverages investigated. Even at higher coverages the formation of higher oxidation states such as carboxylic acid groupings was negligible (<2.5%). Angle resolved X-ray photoelectron spectroscopy measurements have been used to discriminate between surface and sub-surface oxygen. {\textcopyright} 2002 Elsevier Science B.V. All rights reserved.",

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T1 - The oxidation of (100) textured diamond

AU - John, P.

AU - Polwart, N.

AU - Troupe, C. E.

AU - Wilson, J. I B

PY - 2002/3

Y1 - 2002/3

N2 - The thermal oxidation of highly textured (100) chemical vapour deposited (CVD) diamond has been investigated using a combination of high resolution X-ray photoelectron spectroscopy. The diamond samples were oxidised in dry O2 in a vacuum furnace at temperatures up to 800 °C. The kinetics of oxidation of well-defined crystal facets of (100) diamond have been studied using in-situ laser interferometry and thermogravimetric analysis. Concomitant scanning probe microscopic examination of individual facets after oxidation revealed negligible changes to the surface roughness. Oxygen containing functional groups such as ether (COC) and carbonyl (>C=O) have been observed using X-ray photoelectron spectroscopy at all the surface coverages investigated. Even at higher coverages the formation of higher oxidation states such as carboxylic acid groupings was negligible (<2.5%). Angle resolved X-ray photoelectron spectroscopy measurements have been used to discriminate between surface and sub-surface oxygen. © 2002 Elsevier Science B.V. All rights reserved.

AB - The thermal oxidation of highly textured (100) chemical vapour deposited (CVD) diamond has been investigated using a combination of high resolution X-ray photoelectron spectroscopy. The diamond samples were oxidised in dry O2 in a vacuum furnace at temperatures up to 800 °C. The kinetics of oxidation of well-defined crystal facets of (100) diamond have been studied using in-situ laser interferometry and thermogravimetric analysis. Concomitant scanning probe microscopic examination of individual facets after oxidation revealed negligible changes to the surface roughness. Oxygen containing functional groups such as ether (COC) and carbonyl (>C=O) have been observed using X-ray photoelectron spectroscopy at all the surface coverages investigated. Even at higher coverages the formation of higher oxidation states such as carboxylic acid groupings was negligible (<2.5%). Angle resolved X-ray photoelectron spectroscopy measurements have been used to discriminate between surface and sub-surface oxygen. © 2002 Elsevier Science B.V. All rights reserved.

KW - Etching

KW - Photoelectron spectroscopy

KW - Surface

KW - Thermal-oxidation

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U2 - 10.1016/S0925-9635(01)00673-2

DO - 10.1016/S0925-9635(01)00673-2

M3 - Article

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VL - 11

SP - 861

EP - 866

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 3-6

ER -

The oxidation of (100) textured diamond

Abstract

Keywords

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