The implementation of cosserat theory into haptic sensing technology for large deflection beam model

This paper presents a nonlinear design methodology for the modelling of micro-electro-mechanical-systems (MEMS) structures based on Cosserat theory. The article also proposes the integration of this methodology into haptic sensing technologies for real-time simulation of microstructures. Cosserat theory is chosen instead of classical theory for a better representation of stress in miniaturised systems, especially in the nonlinear regime. The use of Cosserat theory leads to a reduction of the complexity of the modelling and thus increases its capability for real time simulation, which is indispensable for haptic technologies. The incorporation of Cosserat theory into haptic sensing technology enables the designer to simulate in real-time the components in a virtual reality environment (VRE), which can enable virtual manufacturing and prototyping. Other significant benefits include the testing of the MEMS structures such as failure diagnosis and reliability of the process. This work is to demonstrate the feasibility of the proposed model. In that respect a cantilever microbeam and microbridge undergoing bending in real time in VRE are presented.