The characteristics of carbon films deposited from a new carbon evaporation source material have been investigated. The source material is produced in the plasma chamber of a saddle field ion source and redeposited utilizing a hybrid deposition system under development. Extensive characterization of the structural, microstructural, optical, and mechanical properties of the carbon films are reported. Raman spectroscopy and optical evaluation of the films indicated that the carbon bonding was mainly graphitic with some sp3 bonding present. Hydrocarbon bonding is also detected. Microbeam and surface analysis studies also confirm these conclusions. The mechanical properties of the films were not consistent with a high density of sp3 bonding. © 1990.
|Number of pages||15|
|Publication status||Published - 1990|
- Carbon films
- hybrid physical vapor deposition