The characterization of ultra-hard carbon films produced from pre-processed carbon powder in a hybrid physical vapor deposition system

D. Tither, A. Dehbi, P. Holiday, A. Matthews, A. G. Fitzgerald, A. E. Henderson, B. E. Storey, T. J. Dines, P. John, J. I B Wilson

Research output: Contribution to journalArticle

Abstract

The characteristics of carbon films deposited from a new carbon evaporation source material have been investigated. The source material is produced in the plasma chamber of a saddle field ion source and redeposited utilizing a hybrid deposition system under development. Extensive characterization of the structural, microstructural, optical, and mechanical properties of the carbon films are reported. Raman spectroscopy and optical evaluation of the films indicated that the carbon bonding was mainly graphitic with some sp3 bonding present. Hydrocarbon bonding is also detected. Microbeam and surface analysis studies also confirm these conclusions. The mechanical properties of the films were not consistent with a high density of sp3 bonding. © 1990.

Original languageEnglish
Pages (from-to)641-655
Number of pages15
JournalCarbon
Volume28
Issue number5
Publication statusPublished - 1990

Keywords

  • Carbon films
  • characterization
  • hybrid physical vapor deposition

Fingerprint Dive into the research topics of 'The characterization of ultra-hard carbon films produced from pre-processed carbon powder in a hybrid physical vapor deposition system'. Together they form a unique fingerprint.

  • Cite this

    Tither, D., Dehbi, A., Holiday, P., Matthews, A., Fitzgerald, A. G., Henderson, A. E., Storey, B. E., Dines, T. J., John, P., & Wilson, J. I. B. (1990). The characterization of ultra-hard carbon films produced from pre-processed carbon powder in a hybrid physical vapor deposition system. Carbon, 28(5), 641-655.