The cavity ring-down spectroscopy of C2 in a microwave plasma

P. John; J. R. Rabeau; J. I B Wilson

doi:10.1016/S0925-9635(01)00653-7

The cavity ring-down spectroscopy of C₂ in a microwave plasma

P. John, J. R. Rabeau, J. I B Wilson

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

The formation of C₂ in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d ³II_g-a ³II_u optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. © 2002 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	608-611
Number of pages	4
Journal	Diamond and Related Materials
Volume	11
Issue number	3-6
DOIs	https://doi.org/10.1016/S0925-9635(01)00653-7
Publication status	Published - Mar 2002

Keywords

Chemical vapor deposition
Diamond films
Plasma
Spectroscopy

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10.1016/S0925-9635(01)00653-7

Cite this

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title = "The cavity ring-down spectroscopy of C2 in a microwave plasma",

abstract = "The formation of C2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3IIg-a 3IIu optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. {\textcopyright} 2002 Elsevier Science B.V. All rights reserved.",

keywords = "Chemical vapor deposition, Diamond films, Plasma, Spectroscopy",

author = "P. John and Rabeau, {J. R.} and Wilson, {J. I B}",

year = "2002",

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journal = "Diamond and Related Materials",

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T1 - The cavity ring-down spectroscopy of C2 in a microwave plasma

AU - John, P.

AU - Rabeau, J. R.

AU - Wilson, J. I B

PY - 2002/3

Y1 - 2002/3

N2 - The formation of C2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3IIg-a 3IIu optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. © 2002 Elsevier Science B.V. All rights reserved.

AB - The formation of C2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3IIg-a 3IIu optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. © 2002 Elsevier Science B.V. All rights reserved.

KW - Chemical vapor deposition

KW - Diamond films

KW - Plasma

KW - Spectroscopy

U2 - 10.1016/S0925-9635(01)00653-7

DO - 10.1016/S0925-9635(01)00653-7

M3 - Article

SN - 0925-9635

VL - 11

SP - 608

EP - 611

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 3-6