Abstract
This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation as well as other integrated functions. In particular, we detail the use of EWOD to anchor droplets while SAW excitation is applied to perform mixing. ©2010 IEEE.
Original language | English |
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Title of host publication | 2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings |
Pages | 52-57 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 2010 |
Event | 2010 International Conference on Microelectronic Test Structures - Hiroshima, Japan Duration: 22 Mar 2010 → 25 Mar 2010 |
Conference
Conference | 2010 International Conference on Microelectronic Test Structures |
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Abbreviated title | ICMTS 2010 |
Country/Territory | Japan |
City | Hiroshima |
Period | 22/03/10 → 25/03/10 |
Keywords
- ElectroWetting On Dielectric (EWOD)
- Manipulation
- Microfluidics
- Mixing
- Surface Acoustic Wave (SAW)
- Test structures
- Transportation