Test structures for characterising the integration of EWOD and SAW technologies for microfluidics

Y. Li, Y. Q. Fu, B. W. Flynn, W. Parkes, Y. Liu, S. Brodie, J. G. Terry, L. I. Haworth, A. S. Bunting, J. T M Stevenson, S Smith, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper presents details of the design and fabrication of test structures specifically designed for the characterisation of two distinct digital microfluidic technologies: Electro-Wetting On Dielectric (EWOD) and Surface Acoustic Wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterise enhanced droplet manipulation as well as other integrated functions. In particular, we detail the use of EWOD to anchor droplets while SAW excitation is applied to perform mixing. ©2010 IEEE.

Original languageEnglish
Title of host publication2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings
Pages52-57
Number of pages6
DOIs
Publication statusPublished - 2010
Event2010 International Conference on Microelectronic Test Structures - Hiroshima, Japan
Duration: 22 Mar 201025 Mar 2010

Conference

Conference2010 International Conference on Microelectronic Test Structures
Abbreviated titleICMTS 2010
CountryJapan
CityHiroshima
Period22/03/1025/03/10

Keywords

  • ElectroWetting On Dielectric (EWOD)
  • Manipulation
  • Microfluidics
  • Mixing
  • Surface Acoustic Wave (SAW)
  • Test structures
  • Transportation

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    Li, Y., Fu, Y. Q., Flynn, B. W., Parkes, W., Liu, Y., Brodie, S., Terry, J. G., Haworth, L. I., Bunting, A. S., Stevenson, J. T. M., Smith, S., & Walton, A. J. (2010). Test structures for characterising the integration of EWOD and SAW technologies for microfluidics. In 2010 International Conference on Microelectronic Test Structures, 23rd IEEE ICMTS Conference Proceedings (pp. 52-57) https://doi.org/10.1109/ICMTS.2010.5466861