System level simulation of a double stator wobble electrostatic micromotor

Research output: Contribution to journalArticle

Abstract

System level simulation results of an electrostatic micromotor, based on closed-form expressions of the static and dynamic torque behaviours, are presented. A double stator, double rotor, wobble motor designed and tested at Heriot Watt University is simulated using the high level language very high speed integrated circuits (VHSIC) hardware description language-analogue mixed signal (VHDL-AMS). The analytical torque model is obtained by two conformal mapping transformations of the electrostatic gap region between the stator and rotor surfaces. Torque results obtained by finite element analysis methods and the proposed simulation model show good agreement. Simulation results of the closed-loop control of the excitation of the motor, based on the dynamic model of the torque, are also presented.

Original languageEnglish
Pages (from-to)312-320
Number of pages9
JournalSensors and Actuators A: Physical
Volume99
Issue number3
DOIs
Publication statusPublished - 5 Jun 2002

Fingerprint

Micromotors
Stators
Electrostatics
Torque
Rotors
Computer hardware description languages
Conformal mapping
High level languages
Integrated circuits
Dynamic models
Finite element method

Keywords

  • Actuator
  • Analytical modelling
  • Conformal mapping
  • MEMS
  • Micromotor
  • System level simulation
  • VHDL-AMS

Cite this

@article{24f7a298cb8846a1b2e4b6e3dab90d0c,
title = "System level simulation of a double stator wobble electrostatic micromotor",
abstract = "System level simulation results of an electrostatic micromotor, based on closed-form expressions of the static and dynamic torque behaviours, are presented. A double stator, double rotor, wobble motor designed and tested at Heriot Watt University is simulated using the high level language very high speed integrated circuits (VHSIC) hardware description language-analogue mixed signal (VHDL-AMS). The analytical torque model is obtained by two conformal mapping transformations of the electrostatic gap region between the stator and rotor surfaces. Torque results obtained by finite element analysis methods and the proposed simulation model show good agreement. Simulation results of the closed-loop control of the excitation of the motor, based on the dynamic model of the torque, are also presented.",
keywords = "Actuator, Analytical modelling, Conformal mapping, MEMS, Micromotor, System level simulation, VHDL-AMS",
author = "Aitor Endemano and Dunnigan, {Mathew Walter} and Desmulliez, {Marc Phillipe Yves}",
year = "2002",
month = "6",
day = "5",
doi = "10.1016/S0924-4247(01)00833-0",
language = "English",
volume = "99",
pages = "312--320",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "3",

}

System level simulation of a double stator wobble electrostatic micromotor. / Endemano, Aitor; Dunnigan, Mathew Walter; Desmulliez, Marc Phillipe Yves.

In: Sensors and Actuators A: Physical, Vol. 99, No. 3, 05.06.2002, p. 312-320.

Research output: Contribution to journalArticle

TY - JOUR

T1 - System level simulation of a double stator wobble electrostatic micromotor

AU - Endemano, Aitor

AU - Dunnigan, Mathew Walter

AU - Desmulliez, Marc Phillipe Yves

PY - 2002/6/5

Y1 - 2002/6/5

N2 - System level simulation results of an electrostatic micromotor, based on closed-form expressions of the static and dynamic torque behaviours, are presented. A double stator, double rotor, wobble motor designed and tested at Heriot Watt University is simulated using the high level language very high speed integrated circuits (VHSIC) hardware description language-analogue mixed signal (VHDL-AMS). The analytical torque model is obtained by two conformal mapping transformations of the electrostatic gap region between the stator and rotor surfaces. Torque results obtained by finite element analysis methods and the proposed simulation model show good agreement. Simulation results of the closed-loop control of the excitation of the motor, based on the dynamic model of the torque, are also presented.

AB - System level simulation results of an electrostatic micromotor, based on closed-form expressions of the static and dynamic torque behaviours, are presented. A double stator, double rotor, wobble motor designed and tested at Heriot Watt University is simulated using the high level language very high speed integrated circuits (VHSIC) hardware description language-analogue mixed signal (VHDL-AMS). The analytical torque model is obtained by two conformal mapping transformations of the electrostatic gap region between the stator and rotor surfaces. Torque results obtained by finite element analysis methods and the proposed simulation model show good agreement. Simulation results of the closed-loop control of the excitation of the motor, based on the dynamic model of the torque, are also presented.

KW - Actuator

KW - Analytical modelling

KW - Conformal mapping

KW - MEMS

KW - Micromotor

KW - System level simulation

KW - VHDL-AMS

UR - http://www.scopus.com/inward/record.url?scp=0037024456&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(01)00833-0

DO - 10.1016/S0924-4247(01)00833-0

M3 - Article

VL - 99

SP - 312

EP - 320

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 3

ER -