Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD

Ruiqiang Yan; Weiya Huang; Qingfeng Wang; Yinzhu Jiang

doi:10.1007/s11581-009-0316-6

Synthesis, characterization, and kinetic study of Mn(DPM)₃ used as precursor for MOCVD

Ruiqiang Yan, Weiya Huang, Qingfeng Wang, Yinzhu Jiang

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

Highly pure Mn(DPM)₃ (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, ¹H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)₃ will dissociate primarily, following with dissociation of ⁺C(CH₃)₃ and ⁺OCCH₂COC(CH₃)₃ groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data. © Springer-Verlag 2009.

Original language	English
Pages (from-to)	627-633
Number of pages	7
Journal	Ionics
Volume	15
Issue number	5
DOIs	https://doi.org/10.1007/s11581-009-0316-6
Publication status	Published - Sept 2009

Keywords

β-Diketonate
Kinetics
Metal-organic chemical vapor deposition
Thermal decomposition

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10.1007/s11581-009-0316-6

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@article{d8679be74efd4e6f8778a993fc53c452,

title = "Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD",

abstract = "Highly pure Mn(DPM)3 (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, 1H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)3 will dissociate primarily, following with dissociation of +C(CH3)3 and +OCCH2COC(CH3)3 groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data. {\textcopyright} Springer-Verlag 2009.",

keywords = "β-Diketonate, Kinetics, Metal-organic chemical vapor deposition, Thermal decomposition",

author = "Ruiqiang Yan and Weiya Huang and Qingfeng Wang and Yinzhu Jiang",

year = "2009",

month = sep,

doi = "10.1007/s11581-009-0316-6",

language = "English",

volume = "15",

pages = "627--633",

journal = "Ionics",

issn = "0947-7047",

publisher = "Springer Science and Business Media Deutschland GmbH",

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TY - JOUR

T1 - Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD

AU - Yan, Ruiqiang

AU - Huang, Weiya

AU - Wang, Qingfeng

AU - Jiang, Yinzhu

PY - 2009/9

Y1 - 2009/9

N2 - Highly pure Mn(DPM)3 (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, 1H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)3 will dissociate primarily, following with dissociation of +C(CH3)3 and +OCCH2COC(CH3)3 groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data. © Springer-Verlag 2009.

AB - Highly pure Mn(DPM)3 (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, 1H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)3 will dissociate primarily, following with dissociation of +C(CH3)3 and +OCCH2COC(CH3)3 groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data. © Springer-Verlag 2009.

KW - β-Diketonate

KW - Kinetics

KW - Metal-organic chemical vapor deposition

KW - Thermal decomposition

UR - https://www.scopus.com/pages/publications/70350143234

U2 - 10.1007/s11581-009-0316-6

DO - 10.1007/s11581-009-0316-6

M3 - Article

SN - 0947-7047

VL - 15

SP - 627

EP - 633

JO - Ionics

JF - Ionics

IS - 5

ER -

Synthesis, characterization, and kinetic study of Mn(DPM)₃ used as precursor for MOCVD

Abstract

Keywords

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