Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD

Ruiqiang Yan, Weiya Huang, Qingfeng Wang, Yinzhu Jiang

Research output: Contribution to journalArticle

Abstract

Highly pure Mn(DPM)3 (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, 1H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)3 will dissociate primarily, following with dissociation of +C(CH3)3 and +OCCH2COC(CH3)3 groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data. © Springer-Verlag 2009.

Original languageEnglish
Pages (from-to)627-633
Number of pages7
JournalIonics
Volume15
Issue number5
DOIs
Publication statusPublished - Sep 2009

Keywords

  • β-Diketonate
  • Kinetics
  • Metal-organic chemical vapor deposition
  • Thermal decomposition

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