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Structure of ultrathin silicon dioxide films
Ian W. Boyd, J. I B Wilson
School of Engineering & Physical Sciences
Research output
:
Contribution to journal
›
Article
›
peer-review
48
Citations (Scopus)
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Dive into the research topics of 'Structure of ultrathin silicon dioxide films'. Together they form a unique fingerprint.
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Physics
Silica
100%
Film Thickness
100%
Silicon Dioxide
100%
Silicon Oxide
50%
Oxide Interface
50%
Single Crystal
50%
Infrared Spectroscopy
50%
Infrared Spectra
50%
Thick Films
50%
INIS
films
100%
silicon oxides
100%
asymmetry
40%
thickness
40%
silicon
40%
strains
20%
levels
20%
spectra
20%
layers
20%
peaks
20%
oxygen
20%
width
20%
interfaces
20%
thin films
20%
spectroscopy
20%
single crystals
20%
bonding
20%
infrared spectra
20%
Material Science
Film
100%
Silicon
100%
Silicon Dioxide
100%
Film Thickness
66%
Single Crystal
33%
Oxide Interface
33%
Thick Films
33%
Chemistry
Liquid Film
100%
Silicon Dioxide
100%
Silicon
40%
Single Crystalline Solid
20%
Silicon Oxide
20%
Structure
20%
Oxide Interface
20%