CdTe films with different compositions (Cd-rich, Te-rich and stoichiometric) were fabricated by a novel and low cost chemical molecular beam deposition method (CMBD) in atmospheric pressure hydrogen flow. Cd and Te granules were used as precursors. The films were deposited on ceramic (SiO2:AlO3) substrates at 580 degrees C and 600 degrees C. The growth rate was varied in the range of 9-30 angstrom/s. The composition (Cd/Te) of the samples was changed by controlling the molecular beam intensity (MBI) ratio. Three samples fabricated at MBI ratios Cd/Te = 0.5, 1.0 and 1. 16 were investigated by XRD, AFM, EDX, SEM, photoluminescence (PL) and Hall methods. (C) 2008 Elsevier Ltd. All rights reserved.