Strain characterization of directly bonded germanium-to-silicon substrates

Isabelle Ferain, N. S. Bennett, Patrick McNally, Susan Holl, Cindy Colinge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Strain characterization of directly bonded germanium-to-silicon substrates'. Together they form a unique fingerprint.

INIS

Engineering

Material Science

Physics