Spatially resolved atomic excitation temperatures in CH₄/H ₂ and C₃H₈/H₂ RF discharges by optical emission spectroscopy

INIS

• hydrogen 100%
• methane 100%
• excitation 100%
• radiowave radiation 100%
• emission spectroscopy 100%
• electrodes 66%
• plasma 66%
• power 66%
• propane 66%
• data 33%
• range 33%
• emission 33%
• plates 33%
• low pressure 33%
• mhz range 33%
• radiations 33%
• argon 33%
• temperature distribution 33%
• flow rate 33%
• pressure (plasma) 33%

Engineering

• Methane 100%
• Radio Frequency 100%
• Parallel Plate 33%
• Two Dimensional 33%
• Flow Rate 33%
• Plate System 33%
• Radiation Intensity 33%
• Spectral Range 33%
• Abel Inversion 33%
• Atomic Hydrogen 33%
• Plasma System 33%
• Temperature Distribution 33%
• Pressure Plasma 33%

Physics

• Methane 100%
• Optical Emission Spectroscopy 100%
• Radio Frequency Discharge 100%
• Parallel Plate 33%
• Actinometers 33%
• Plasma System 33%
• Flow Velocity 33%
• Light Emission 33%
• Radiant Flux Density 33%
• Temperature Distribution 33%