Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay; N. Pleynet; D. Xiao; R. J. Warburton; D. T. Reid

Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

Original language	English
Title of host publication	2005 Conference on Lasers and Electro-Optics, CLEO
Pages	663-665
Number of pages	3
Volume	1
Publication status	Published - 2005
Event	2005 Quantum Electronics and Laser Science Conference - Baltimore, MD, United States Duration: 22 May 2005 → 27 May 2005

Conference

Conference	2005 Quantum Electronics and Laser Science Conference
Abbreviated title	QELS
Country/Territory	United States
City	Baltimore, MD
Period	22/05/05 → 27/05/05

Cite this

@inproceedings{5cfd4b0be2614dc7864e7dc57bcbabc7,

title = "Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method",

abstract = "We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. {\textcopyright} 2005 Optical Society of America.",

author = "E. Ramsay and N. Pleynet and D. Xiao and Warburton, {R. J.} and Reid, {D. T.}",

year = "2005",

language = "English",

isbn = "1557527954",

volume = "1",

pages = "663--665",

booktitle = "2005 Conference on Lasers and Electro-Optics, CLEO",

note = "2005 Quantum Electronics and Laser Science Conference, QELS ; Conference date: 22-05-2005 Through 27-05-2005",

}

TY - GEN

T1 - Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

AU - Ramsay, E.

AU - Pleynet, N.

AU - Xiao, D.

AU - Warburton, R. J.

AU - Reid, D. T.

PY - 2005

Y1 - 2005

N2 - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

AB - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

M3 - Conference contribution

SN - 1557527954

VL - 1

SP - 663

EP - 665

BT - 2005 Conference on Lasers and Electro-Optics, CLEO

T2 - 2005 Quantum Electronics and Laser Science Conference

Y2 - 22 May 2005 through 27 May 2005

ER -

Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

Abstract

Conference

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