Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

Original languageEnglish
Title of host publication2005 Conference on Lasers and Electro-Optics, CLEO
Pages663-665
Number of pages3
Volume1
Publication statusPublished - 2005
Event2005 Quantum Electronics and Laser Science Conference - Baltimore, MD, United States
Duration: 22 May 200527 May 2005

Conference

Conference2005 Quantum Electronics and Laser Science Conference
Abbreviated titleQELS
CountryUnited States
CityBaltimore, MD
Period22/05/0527/05/05

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submerging
fiber lasers
photocurrents
chips
high resolution
photons
silicon

Cite this

Ramsay, E., Pleynet, N., Xiao, D., Warburton, R. J., & Reid, D. T. (2005). Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. In 2005 Conference on Lasers and Electro-Optics, CLEO (Vol. 1, pp. 663-665)
Ramsay, E. ; Pleynet, N. ; Xiao, D. ; Warburton, R. J. ; Reid, D. T. / Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. 2005 Conference on Lasers and Electro-Optics, CLEO. Vol. 1 2005. pp. 663-665
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abstract = "We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. {\circledC} 2005 Optical Society of America.",
author = "E. Ramsay and N. Pleynet and D. Xiao and Warburton, {R. J.} and Reid, {D. T.}",
year = "2005",
language = "English",
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Ramsay, E, Pleynet, N, Xiao, D, Warburton, RJ & Reid, DT 2005, Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. in 2005 Conference on Lasers and Electro-Optics, CLEO. vol. 1, pp. 663-665, 2005 Quantum Electronics and Laser Science Conference, Baltimore, MD, United States, 22/05/05.

Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. / Ramsay, E.; Pleynet, N.; Xiao, D.; Warburton, R. J.; Reid, D. T.

2005 Conference on Lasers and Electro-Optics, CLEO. Vol. 1 2005. p. 663-665.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

AU - Ramsay, E.

AU - Pleynet, N.

AU - Xiao, D.

AU - Warburton, R. J.

AU - Reid, D. T.

PY - 2005

Y1 - 2005

N2 - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

AB - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

M3 - Conference contribution

SN - 1557527954

VL - 1

SP - 663

EP - 665

BT - 2005 Conference on Lasers and Electro-Optics, CLEO

ER -

Ramsay E, Pleynet N, Xiao D, Warburton RJ, Reid DT. Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. In 2005 Conference on Lasers and Electro-Optics, CLEO. Vol. 1. 2005. p. 663-665