Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 Optical Society of America.

Original languageEnglish
Title of host publication2005 Conference on Lasers and Electro-Optics, CLEO
Pages663-665
Number of pages3
Volume1
Publication statusPublished - 2005
Event2005 Quantum Electronics and Laser Science Conference - Baltimore, MD, United States
Duration: 22 May 200527 May 2005

Conference

Conference2005 Quantum Electronics and Laser Science Conference
Abbreviated titleQELS
CountryUnited States
CityBaltimore, MD
Period22/05/0527/05/05

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  • Cite this

    Ramsay, E., Pleynet, N., Xiao, D., Warburton, R. J., & Reid, D. T. (2005). Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method. In 2005 Conference on Lasers and Electro-Optics, CLEO (Vol. 1, pp. 663-665)