Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 IEEE.

Original languageEnglish
Title of host publication2005 Conference on Lasers and Electro-Optics Europe
DOIs
Publication statusPublished - 2005
Event2005 Conference on Lasers and Elctro-Optics Europe - Munich, Germany
Duration: 12 Jun 200517 Jun 2005

Conference

Conference2005 Conference on Lasers and Elctro-Optics Europe
CountryGermany
CityMunich
Period12/06/0517/06/05

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