Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay; N. Pleynet; D. Xiao; R. J. Warburton; D. T. Reid

doi:10.1109/CLEOE.2005.1568022

Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, D. T. Reid

School of Engineering & Physical Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 IEEE.

Original language	English
Title of host publication	2005 Conference on Lasers and Electro-Optics Europe
DOIs	https://doi.org/10.1109/CLEOE.2005.1568022
Publication status	Published - 2005
Event	2005 Conference on Lasers and Elctro-Optics Europe - Munich, Germany Duration: 12 Jun 2005 → 17 Jun 2005

Conference

Conference	2005 Conference on Lasers and Elctro-Optics Europe
Country/Territory	Germany
City	Munich
Period	12/06/05 → 17/06/05

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10.1109/CLEOE.2005.1568022

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@inproceedings{7bcaff065a534747b9bd65746b1ddef7,

title = "Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method",

abstract = "We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. {\textcopyright} 2005 IEEE.",

author = "E. Ramsay and N. Pleynet and D. Xiao and Warburton, {R. J.} and Reid, {D. T.}",

year = "2005",

doi = "10.1109/CLEOE.2005.1568022",

language = "English",

isbn = "0780389743",

booktitle = "2005 Conference on Lasers and Electro-Optics Europe",

note = "2005 Conference on Lasers and Elctro-Optics Europe ; Conference date: 12-06-2005 Through 17-06-2005",

}

TY - GEN

T1 - Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

AU - Ramsay, E.

AU - Pleynet, N.

AU - Xiao, D.

AU - Warburton, R. J.

AU - Reid, D. T.

PY - 2005

Y1 - 2005

N2 - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 IEEE.

AB - We report high resolution solid-immersion sub-surface imaging of a flip-chip by detecting the two-photon photocurrent generated by a 1530nm femtosecond Er:fiber laser. Features show high contrast and a resolution of 325nm. © 2005 IEEE.

UR - http://www.scopus.com/inward/record.url?scp=42749107727&partnerID=8YFLogxK

U2 - 10.1109/CLEOE.2005.1568022

DO - 10.1109/CLEOE.2005.1568022

M3 - Conference contribution

SN - 0780389743

SN - 9780780389748

BT - 2005 Conference on Lasers and Electro-Optics Europe

T2 - 2005 Conference on Lasers and Elctro-Optics Europe

Y2 - 12 June 2005 through 17 June 2005

ER -

Solid-immersion imaging of a silicon flip-chip with a resolution of 325nm using the optical-beam induced current method

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