Small angle electron scattering in aSi and aSi: H films

A. J. Craven, A. M. Patterson, A. R. Long, J. I B Wilson

Research output: Contribution to journalArticle

Abstract

Some results of small angle electron scattering studies performed on aSi and aSi:H films prepared both by RF sputtering and by glow discharge decomposition of silane are discussed. © 1985.

Original languageEnglish
Pages (from-to)217-220
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume77-78
Issue numberPART 1
Publication statusPublished - 2 Dec 1985

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    Craven, A. J., Patterson, A. M., Long, A. R., & Wilson, J. I. B. (1985). Small angle electron scattering in aSi and aSi: H films. Journal of Non-Crystalline Solids, 77-78(PART 1), 217-220.