Single-pulse multiphoton fabrication of high aspect ratio structures with sub-micron features using vortex beams

Benjamin Mills*, Dmytro Kundys, Maria Farsari, Sakellaris Mailis, Robert W. Eason

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

Single ultra-short pulses from Gaussian and vortex beams have been used for the fabrication of complex micro-structures via multi-photon polymerization. The complexity of the resultant micro-structures stems from the modification of both transverse intensity and phase profiles of these single pulses to create modulated scaffolds and hollow cylinders. Experimental results are compared to theoretical models, and good agreement is shown.

Original languageEnglish
Pages (from-to)651-655
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume108
Issue number3
DOIs
Publication statusPublished - Sept 2012

Keywords

  • 2-PHOTON POLYMERIZATION
  • LASER
  • MICROFABRICATION
  • INTERFERENCE
  • LITHOGRAPHY
  • RESOLUTION

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