Single-pulse femtosecond laser machining of glass

S. Campbell, F. C. Dear, D. P. Hand, D. T. Reid

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

We describe a study of single-pulse machining of glass with 150 fs pulses at 800 nm (Ti:sapphire) and present results demonstrating in a quantitative way the dependence of the machining quality on the focal position and the pulse energy of the laser beam. We report experimental results indicating the creation of sub-diffraction limited structures. A theoretical calculation of the ablation threshold of glass is inferred from our experimental results to be 5.55 J cm-2. Results are also presented that illustrate the dependence of the machining quality on the pulse duration used. A technique for optimizing the focal position at energies below the machining threshold is detailed and the results of a related study investigating the self-focusing of femtosecond beams in air are described. © 2005 IOP Publishing Ltd.

Original languageEnglish
Pages (from-to)162-168
Number of pages7
JournalJournal of Optics A: Pure and Applied Optics
Volume7
Issue number4
DOIs
Publication statusPublished - Apr 2005

Keywords

  • Femtosecond machining
  • Laser ablation
  • Laser processing

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