Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, Derryck T. Reid

Research output: Contribution to journalArticle

Abstract

This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

Original languageEnglish
Article number61080G
JournalProceedings of SPIE - the International Society for Optical Engineering
Volume6108
DOIs
Publication statusPublished - 2006
EventCommercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States
Duration: 17 Jan 200619 Jan 2006

Keywords

  • Flip-Chip
  • Nonlinear Microscopy
  • Solid Immersion Lens
  • Two-Photon Imaging

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