Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay; Nicholas Pleynet; Dong Xiao; Richard J. Warburton; Derryck T. Reid

doi:10.1117/12.645629

Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, Derryck T. Reid

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

Original language	English
Article number	61080G
Journal	Proceedings of SPIE
Volume	6108
DOIs	https://doi.org/10.1117/12.645629
Publication status	Published - 2006
Event	Commercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States Duration: 17 Jan 2006 → 19 Jan 2006

Keywords

Flip-Chip
Nonlinear Microscopy
Solid Immersion Lens
Two-Photon Imaging

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10.1117/12.645629

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abstract = "This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.",

keywords = "Flip-Chip, Nonlinear Microscopy, Solid Immersion Lens, Two-Photon Imaging",

author = "Euan Ramsay and Nicholas Pleynet and Dong Xiao and Warburton, {Richard J.} and Reid, {Derryck T.}",

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language = "English",

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AU - Ramsay, Euan

AU - Pleynet, Nicholas

AU - Xiao, Dong

AU - Warburton, Richard J.

AU - Reid, Derryck T.

PY - 2006

Y1 - 2006

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AB - This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

KW - Flip-Chip

KW - Nonlinear Microscopy

KW - Solid Immersion Lens

KW - Two-Photon Imaging

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VL - 6108

JO - Proceedings of SPIE

JF - Proceedings of SPIE

M1 - 61080G

T2 - Commercial and Biomedical Applications of Ultrafast Lasers VI

Y2 - 17 January 2006 through 19 January 2006

ER -

Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Abstract

Keywords

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