This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.
|Journal||Proceedings of SPIE - the International Society for Optical Engineering|
|Publication status||Published - 2006|
|Event||Commercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States|
Duration: 17 Jan 2006 → 19 Jan 2006
- Nonlinear Microscopy
- Solid Immersion Lens
- Two-Photon Imaging