Abstract
This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.
Original language | English |
---|---|
Article number | 61080G |
Journal | Proceedings of SPIE - the International Society for Optical Engineering |
Volume | 6108 |
DOIs | |
Publication status | Published - 2006 |
Event | Commercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States Duration: 17 Jan 2006 → 19 Jan 2006 |
Keywords
- Flip-Chip
- Nonlinear Microscopy
- Solid Immersion Lens
- Two-Photon Imaging