Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay; Nicholas Pleynet; Dong Xiao; Richard J. Warburton; Derryck T. Reid

doi:10.1117/12.645629

Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, Derryck T. Reid

School of Engineering & Physical Sciences

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

Original language	English
Article number	61080G
Journal	Proceedings of SPIE - the International Society for Optical Engineering
Volume	6108
DOIs	https://doi.org/10.1117/12.645629
Publication status	Published - 2006
Event	Commercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States Duration: 17 Jan 2006 → 19 Jan 2006

Keywords

Flip-Chip
Nonlinear Microscopy
Solid Immersion Lens
Two-Photon Imaging

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10.1117/12.645629

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abstract = "This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.",

keywords = "Flip-Chip, Nonlinear Microscopy, Solid Immersion Lens, Two-Photon Imaging",

author = "Euan Ramsay and Nicholas Pleynet and Dong Xiao and Warburton, {Richard J.} and Reid, {Derryck T.}",

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language = "English",

volume = "6108",

journal = "Proceedings of SPIE - the International Society for Optical Engineering",

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T1 - Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

AU - Ramsay, Euan

AU - Pleynet, Nicholas

AU - Xiao, Dong

AU - Warburton, Richard J.

AU - Reid, Derryck T.

PY - 2006

Y1 - 2006

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AB - This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Enfiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

KW - Flip-Chip

KW - Nonlinear Microscopy

KW - Solid Immersion Lens

KW - Two-Photon Imaging

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DO - 10.1117/12.645629

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VL - 6108

JO - Proceedings of SPIE - the International Society for Optical Engineering

JF - Proceedings of SPIE - the International Society for Optical Engineering

M1 - 61080G

T2 - Commercial and Biomedical Applications of Ultrafast Lasers VI

Y2 - 17 January 2006 through 19 January 2006

ER -

Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

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Keywords

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