Shallow junctions in silicon via low thermal budget processing

B.J. Sealy, A.J. Smith, T. Alzanki, N. Bennett, L. Li, C. Jeynes, B. Colombeau, E.J.H. Collart, N.G. Emerson, R.M. Gwilliam, N.E.B. Cowern

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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