Shallow junctions in silicon via low thermal budget processing
- B.J. Sealy
- , A.J. Smith
- , T. Alzanki
- , N. Bennett
- , L. Li
- , C. Jeynes
- , B. Colombeau
- , E.J.H. Collart
- , N.G. Emerson
- , R.M. Gwilliam
- , N.E.B. Cowern
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
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(Scopus)