Abstract
A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.
| Original language | English |
|---|---|
| Article number | 024502 |
| Number of pages | 9 |
| Journal | Review of Scientific Instruments |
| Volume | 85 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Feb 2014 |
Keywords
- Adaptive Optics
- Lasers in Manufacturing