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Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Bekker, C. (Creator), Arshad, M. J. (Contributor), Cilibrizzi, P. (Contributor), Nikolatos, C. (Contributor), Lomax, P. (Contributor), Wood, G. S. (Contributor), Cheung, R. (Contributor), Knolle, W. (Contributor), Ross, N. (Contributor), Gerardot, B. D. (Contributor) & Bonato, C. (Contributor), Heriot-Watt University, 27 Apr 2023
DOI: 10.17861/f7f4f2cf-03af-43b3-ae17-af5de3f26a27, https://www.dropbox.com/s/xt4sv64t58vkxuo/Dataset_bekkeretal_grayscale_hardmask_2023.zip?dl=0
Dataset