Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

Christiaan Bekker*, Muhammad Junaid Arshad, Pasquale Cilibrizzi, Charalampos Nikolatos, Peter Lomax, Graham S. Wood, Rebecca Cheung, Wolfgang Knolle, Neil Ross, Brian D. Gerardot, Cristian Bonato

*Corresponding author for this work

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14 Citations (Scopus)
131 Downloads (Pure)

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