TY - JOUR
T1 - Review of test methods used for the measurement of hermeticity in packages containing small cavities
AU - Costello (Nee Millar), Suzanne
AU - Desmulliez, Marc P. Y.
AU - McCracken, Stewart
PY - 2012/3
Y1 - 2012/3
N2 - This paper presents a critical review of the traditional and newly proposed test methods used for the measurement of hermeticity in packages with very small cavity volumes. Closed-form expressions of the minimum and maximum true leak rates achievable are provided for the helium fine leak test method. These expressions are shown to provide practical guidelines for the accurate testing of hermeticity for ultrasmall packages. A portfolio of hermeticity test methods is also presented outlining the limitations and advantages of each method.
AB - This paper presents a critical review of the traditional and newly proposed test methods used for the measurement of hermeticity in packages with very small cavity volumes. Closed-form expressions of the minimum and maximum true leak rates achievable are provided for the helium fine leak test method. These expressions are shown to provide practical guidelines for the accurate testing of hermeticity for ultrasmall packages. A portfolio of hermeticity test methods is also presented outlining the limitations and advantages of each method.
U2 - 10.1109/TCPMT.2011.2176122
DO - 10.1109/TCPMT.2011.2176122
M3 - Literature review
SN - 2156-3950
VL - 2
SP - 430
EP - 438
JO - IEEE Transactions on Components, Packaging and Manufacturing Technology
JF - IEEE Transactions on Components, Packaging and Manufacturing Technology
IS - 3
ER -