Review of test methods used for the measurement of hermeticity in packages containing small cavities

Suzanne Costello (Nee Millar), Marc P. Y. Desmulliez, Stewart McCracken

Research output: Contribution to journalLiterature review

22 Citations (Scopus)
3864 Downloads (Pure)

Abstract

This paper presents a critical review of the traditional and newly proposed test methods used for the measurement of hermeticity in packages with very small cavity volumes. Closed-form expressions of the minimum and maximum true leak rates achievable are provided for the helium fine leak test method. These expressions are shown to provide practical guidelines for the accurate testing of hermeticity for ultrasmall packages. A portfolio of hermeticity test methods is also presented outlining the limitations and advantages of each method.

Original languageEnglish
Pages (from-to)430-438
Number of pages9
JournalIEEE Transactions on Components, Packaging and Manufacturing Technology
Volume2
Issue number3
DOIs
Publication statusPublished - Mar 2012

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