Reliability modelling and analysis of thermal MEMS

Sylvaine Muratet, Srikanth Lavu, Jean Yves Fourniols, George Bell, M. P Y Desmulliez

Research output: Contribution to journalArticle

Abstract

This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions. © 2006 IOP Publishing Ltd.

Original languageEnglish
Pages (from-to)235-240
Number of pages6
JournalJournal of Physics: Conference Series
Volume34
Issue number1
DOIs
Publication statusPublished - 1 Apr 2006

Fingerprint

MEMS
Actuators
Computer hardware description languages
Failure modes
Sensors
Hot Temperature
Virtual prototyping

Keywords

  • FMEA
  • MEMS reliability
  • Thermal actuator
  • Virtual prototype

Cite this

Muratet, Sylvaine ; Lavu, Srikanth ; Fourniols, Jean Yves ; Bell, George ; Desmulliez, M. P Y. / Reliability modelling and analysis of thermal MEMS. In: Journal of Physics: Conference Series. 2006 ; Vol. 34, No. 1. pp. 235-240.
@article{3351cff5c5c7473184cf35af7eb1d734,
title = "Reliability modelling and analysis of thermal MEMS",
abstract = "This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions. {\circledC} 2006 IOP Publishing Ltd.",
keywords = "FMEA, MEMS reliability, Thermal actuator, Virtual prototype",
author = "Sylvaine Muratet and Srikanth Lavu and Fourniols, {Jean Yves} and George Bell and Desmulliez, {M. P Y}",
year = "2006",
month = "4",
day = "1",
doi = "10.1088/1742-6596/34/1/039",
language = "English",
volume = "34",
pages = "235--240",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing",
number = "1",

}

Reliability modelling and analysis of thermal MEMS. / Muratet, Sylvaine; Lavu, Srikanth; Fourniols, Jean Yves; Bell, George; Desmulliez, M. P Y.

In: Journal of Physics: Conference Series, Vol. 34, No. 1, 01.04.2006, p. 235-240.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Reliability modelling and analysis of thermal MEMS

AU - Muratet, Sylvaine

AU - Lavu, Srikanth

AU - Fourniols, Jean Yves

AU - Bell, George

AU - Desmulliez, M. P Y

PY - 2006/4/1

Y1 - 2006/4/1

N2 - This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions. © 2006 IOP Publishing Ltd.

AB - This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions. © 2006 IOP Publishing Ltd.

KW - FMEA

KW - MEMS reliability

KW - Thermal actuator

KW - Virtual prototype

UR - http://www.scopus.com/inward/record.url?scp=33744507025&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/34/1/039

DO - 10.1088/1742-6596/34/1/039

M3 - Article

VL - 34

SP - 235

EP - 240

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

ER -