Reliability modelling and analysis of thermal MEMS

Sylvaine Muratet, Srikanth Lavu, Jean Yves Fourniols, George Bell, M. P Y Desmulliez

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)


This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions. © 2006 IOP Publishing Ltd.

Original languageEnglish
Pages (from-to)235-240
Number of pages6
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 1 Apr 2006


  • FMEA
  • MEMS reliability
  • Thermal actuator
  • Virtual prototype


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