Abstract
This paper presents the recent advances in the development of a laser assisted fast polymer bonding method for electronic packaging applications. In this method a high power diode laser is used to cure a polymer adhesive material to bond substrates together. A unique beam forming method using custom designed optical phase plate elements was developed to transform a fiber delivered laser beam into top-hat and frame shaped beam profiles for energy efficient polymer bonding for electronics manufacturing. In addition it has been found that the frame shaped beam profile can produce a desirable temperature distribution for MEMS packaging in which the surface temperature at the center of the substrate is lower by ~50°C than the packaging temperature (~300°C) when bonding a glass cap to a silicon substrate. An accurate temperature monitoring method using an embedded thin film microsensor array has been developed and has been used successfully for process monitoring. Defect-free fast bonding (~10 seconds) of transparent cap (glass) and non-transparent cap (silicon) to a silicon chip has been demonstrated. This work illustrates the potential of the diode laser based photonic technology for advanced MEMS packaging and electronics manufacturing. ©2009 IEEE.
Original language | English |
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Title of host publication | 2009 International Conference on Electronic Packaging Technology and High Density Packaging, ICEPT-HDP 2009 |
Pages | 31-35 |
Number of pages | 5 |
DOIs | |
Publication status | Published - 2009 |
Event | 2009 International Conference on Electronic Packaging Technology and High Density Packaging - Beijing, China Duration: 10 Aug 2009 → 13 Aug 2009 |
Conference
Conference | 2009 International Conference on Electronic Packaging Technology and High Density Packaging |
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Abbreviated title | ICEPT-HDP 2009 |
Country/Territory | China |
City | Beijing |
Period | 10/08/09 → 13/08/09 |