Rapid laser patterning versus wet-etch lithography for flat panel display manufacture: A technical & commercial comparison

Matt Henry, Jozef Wendland, Paul M. Harrison, Duncan Hand

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Rapid Laser Patterning (RLP) of ITO thin films on glass offers a credible industrial alternative to wet-etch lithography for the manufacture of Flat Panel Displays - particularly for Plasma Displays. For any disruptive technology it is necessary to compare and contrast it with the existing manufacturing technique so that end users can make an informed decision as to its relative merits - both technical and commercial. Both processes are compared empirically and it is demonstrated that RLP offers benefits in terms of edge resolution, taper and is less prone to residue. Furthermore a commercial cost model is generated based on real capital and operational cost data. This model suggests that RLP can offer cost savings in the order of tens of millions of dollars for a single production line over a three year depreciation period.

Original languageEnglish
Title of host publication26th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2007 - Congress Proceedings
Publication statusPublished - 2007
Event26th International Congress on Applications of Lasers and Electro-Optics - Orlando, FL, United States
Duration: 29 Oct 20071 Nov 2007

Conference

Conference26th International Congress on Applications of Lasers and Electro-Optics
Abbreviated titleICALEO 2007
CountryUnited States
CityOrlando, FL
Period29/10/071/11/07

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    Henry, M., Wendland, J., Harrison, P. M., & Hand, D. (2007). Rapid laser patterning versus wet-etch lithography for flat panel display manufacture: A technical & commercial comparison. In 26th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2007 - Congress Proceedings