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Raman scattering studies of ultrashallow Sb implants in strained Si
L. O'Reilly*, Nick S Bennett, P. J. McNally, B. J. Sealy, Nick E. B. Cowern, A. Lankinen, T. O. Tuomi
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)