Abstract
A noncontact rugged interferometric fiber optic sensor to measure surface profiles of optically rough surfaces is reported. Depending on the selected spot size its horizontal resolution is 7µm and vertical resolution is 10 nm. Its application to automated tool wear monitoring is indicated, in particular for profiling soft materials or those with highly varying reflectivities.
| Original language | English |
|---|---|
| Pages (from-to) | 1361-1363 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 18 |
| Issue number | 16 |
| Publication status | Published - 1 Jan 1993 |