Profile measurement of optically rough surfaces by fiber-optic interferometry

D. P. Hand, Tom Carolan, J. S. Barton, J. D C Jones

Research output: Contribution to journalArticlepeer-review

Abstract

A noncontact rugged interferometric fiber optic sensor to measure surface profiles of optically rough surfaces is reported. Depending on the selected spot size its horizontal resolution is 7µm and vertical resolution is 10 nm. Its application to automated tool wear monitoring is indicated, in particular for profiling soft materials or those with highly varying reflectivities.

Original languageEnglish
Pages (from-to)1361-1363
Number of pages3
JournalOptics Letters
Volume18
Issue number16
Publication statusPublished - 1 Jan 1993

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