Probing electrical signals in silicon CMOS devices using electric field induced second harmonic generation

Dong Xiao, Euan Ramsay, Bernd Offenbeck, Norbert Weber, Derryck T. Reid

Research output: Contribution to journalArticlepeer-review

Abstract

We report the use of electric field induced second harmonic generation to probe electrical signals in a CMOS chip. The second harmonic of incident 2.3 µm illumination provided by a femtosecond optical parametric oscillator was measured and shown to .depend quadratically on both optical intensity and on the applied DC electric field. By using a near infrared photomultiplier tube it was possible to monitor directly the electrical waveform in the chip on the oscilloscope.

Original languageEnglish
Article number61080H
JournalProceedings of SPIE - the International Society for Optical Engineering
Volume6108
DOIs
Publication statusPublished - 2006
EventCommercial and Biomedical Applications of Ultrafast Lasers VI - San Jose, CA, United States
Duration: 17 Jan 200619 Jan 2006

Keywords

  • EFISH
  • Flip-chip
  • Nonlinear imaging

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