Precision laser processing of optical microstructures with slab waveguide CO2 lasers

Howard J. Baker, Gavin A J Markillie, Paul Field, Qiusheng Cao, Carsten Janke, Denis R. Hall

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


High precision laser direct writing of two types of micro-optical structure is demonstrated using a workstation built around a commercial CO2 slab waveguide laser. Drift and fluctuations in beam pointing, beam shape and pulse energy are quantified, providing an understanding of the precision capabilities. Quartz glass ablation by waveguide laser pulses of width in the 20 to 60 µs range has been characterized and a refractive microlens machined, involving material removal to a depth of 70 µm. Surface structures in aluminum with 143 µm lattice spacing have been produced to act as two dimensional photonic bandgap devices, modifying the transmission properties of hollow planar waveguides in the mid-infrared.

Original languageEnglish
Pages (from-to)625-634
Number of pages10
JournalProceedings of SPIE - the International Society for Optical Engineering
Publication statusPublished - 2000
EventHigh-Power Lasers in Manufacturing - Osaka, Jpn
Duration: 1 Nov 19995 Nov 1999


Dive into the research topics of 'Precision laser processing of optical microstructures with slab waveguide CO2 lasers'. Together they form a unique fingerprint.

Cite this