@inproceedings{21a1b9d6903944129b4de441456b8e42,
title = "Plasma Treatment of 3C-SiC Surfaces",
keywords = "3C-SiC, FT-IR, Plasma",
author = "Giovanni Attolini and Rotonda, \{P. M.\} and C. Cornelissen and M. Mazzera and Matteo Bosi",
year = "2013",
doi = "10.4028/www.scientific.net/MSF.740-742.287",
language = "English",
volume = "740-742",
series = "Materials Science Forum",
pages = "287--290",
editor = "Lebedev, \{Alexander A. \} and Davydov, \{Sergey Yu.\} and Ivanov, \{Pavel A. \} and Levinshtein, \{Mikhail E. \}",
booktitle = "Silicon Carbide and Related Materials 2012",
}