Plasma Treatment of 3C-SiC Surfaces

Giovanni Attolini; P. M. Rotonda; C. Cornelissen; M. Mazzera; Matteo Bosi

doi:10.4028/www.scientific.net/MSF.740-742.287

Plasma Treatment of 3C-SiC Surfaces

Giovanni Attolini, P. M. Rotonda, C. Cornelissen, M. Mazzera, Matteo Bosi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Silicon Carbide and Related Materials 2012
Editors	Alexander A. Lebedev, Sergey Yu. Davydov, Pavel A. Ivanov, Mikhail E. Levinshtein
Pages	287-290
Volume	740-742
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.740-742.287
Publication status	Published - 2013

Publication series

Name	Materials Science Forum
Volume	740-742
ISSN (Print)	0255-5476

Keywords

3C-SiC
FT-IR
Plasma

Access to Document

10.4028/www.scientific.net/MSF.740-742.287

Cite this

@inproceedings{21a1b9d6903944129b4de441456b8e42,

title = "Plasma Treatment of 3C-SiC Surfaces",

keywords = "3C-SiC, FT-IR, Plasma",

author = "Giovanni Attolini and Rotonda, \{P. M.\} and C. Cornelissen and M. Mazzera and Matteo Bosi",

year = "2013",

doi = "10.4028/www.scientific.net/MSF.740-742.287",

language = "English",

volume = "740-742",

series = "Materials Science Forum",

pages = "287--290",

editor = "Lebedev, \{Alexander A. \} and Davydov, \{Sergey Yu.\} and Ivanov, \{Pavel A. \} and Levinshtein, \{Mikhail E. \}",

booktitle = "Silicon Carbide and Related Materials 2012",

}

Plasma Treatment of 3C-SiC Surfaces. / Attolini, Giovanni; Rotonda, P. M.; Cornelissen, C. et al.
Silicon Carbide and Related Materials 2012. ed. / Alexander A. Lebedev; Sergey Yu. Davydov; Pavel A. Ivanov; Mikhail E. Levinshtein. Vol. 740-742 2013. p. 287-290 (Materials Science Forum; Vol. 740-742).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Plasma Treatment of 3C-SiC Surfaces

AU - Attolini, Giovanni

AU - Rotonda, P. M.

AU - Cornelissen, C.

AU - Mazzera, M.

AU - Bosi, Matteo

PY - 2013

Y1 - 2013

KW - 3C-SiC

KW - FT-IR

KW - Plasma

U2 - 10.4028/www.scientific.net/MSF.740-742.287

DO - 10.4028/www.scientific.net/MSF.740-742.287

M3 - Conference contribution

VL - 740-742

T3 - Materials Science Forum

SP - 287

EP - 290

BT - Silicon Carbide and Related Materials 2012

A2 - Lebedev, Alexander A.

A2 - Davydov, Sergey Yu.

A2 - Ivanov, Pavel A.

A2 - Levinshtein, Mikhail E.

ER -